• Piezo Driven Step Motor with Low Hysteresis
• Holds Reached Position without Current
• XY or XYZ Combinations
• Travels up to 48mm
• Open or Closed Loop Application
• Precision Ball Bearing Guides
• Step Width about 15nm
• Positioning Accuracy Better than 50nm
• Velocity Up to 2mm/s
• CNC-Machined Aluminum Body
• No Limit Switches Necessary
• Vacuum Preparation Option
• Customized Designs Possible
• Driven by Handheld CN.030.0001 or USB Controller CU.030.xx0x

                     Travel:   8, 18, or 30mm

                     Max. Speed:    2mm/s (depending on controller)

                     Mass:    32, 38, or 54g

                     Load Characteristics

                       Max. load

                       Mx, My, Mz:    0.5 Nm

                       Fx (blocking force:    4.5 (5) N

                       Fy, Fz:    30 N

                     Resolution (calculated)

                       Single Step:     ~200nm

                       1/16th Step:    ~15nm (w/controller CU 30)

                       Half Step:         ~100nm

                       Double Step:    ~400nm (w/controller CN 30)

                     Guidance Accuracy (without load)

                       For 8mm Travel:                

                       Yaw Angle:    <20 arc sec

                       Pitch Angle:    <60 arc sec

                       Vertical Deviation:    <1 um

                       Lateral Deviation:    <2 um

Base Unit Diameter 1.450"

MS30 Handling and Assembling Document - Stack MS30 stages into XY or XYZ configurations with the same or different travel range on each axis 8, 18, 30, or 45mm.  This document describes how they should be handled and assembled.  These stages have few magnetic components so they can operate in high magnetic fields and are also available in vacuum compatible and cryogenic configurations